Understanding interferometry for micro-cantilever displacement detection
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چکیده
منابع مشابه
Understanding interferometry for micro-cantilever displacement detection
Interferometric displacement detection in a cantilever-based non-contact atomic force microscope (NC-AFM) operated in ultra-high vacuum is demonstrated for the Michelson and Fabry-Pérot modes of operation. Each mode is addressed by appropriately adjusting the distance between the fiber end delivering and collecting light and a highly reflective micro-cantilever, both together forming the interf...
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The fabrication and characterization of SiGeC cantilever microcoolers are described. Silicon on insulator (SOI) was used as the substrate, and two layers of 3 μm p-SiGe0.07C0.0075 and 1.14 μm n-SiGe0.07C0.0075 lattice matched to silicon were grown using molecular beam epitaxy. The uni couple cooler was fabricated using conventional integrated circuit (IC) processing, and the cantilever structur...
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امروزه استفاده از منابع انرژی پراکنده کاربرد وسیعی یافته است . اگر چه این منابع بسیاری از مشکلات شبکه را حل می کنند اما زیاد شدن آنها مسائل فراوانی برای سیستم قدرت به همراه دارد . استفاده از میکروشبکه راه حلی است که علاوه بر استفاده از مزایای منابع انرژی پراکنده برخی از مشکلات ایجاد شده توسط آنها را نیز منتفی می کند . همچنین میکروشبکه ها کیفیت برق و قابلیت اطمینان تامین انرژی مشترکان را افزایش ...
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ژورنال
عنوان ژورنال: Beilstein Journal of Nanotechnology
سال: 2016
ISSN: 2190-4286
DOI: 10.3762/bjnano.7.76